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1

Thermal characterisation of a direction dependent flow sensor

P. Fürjes, G. Légrádi, Cs. Dücső, A. Aszódi, I. Bársony

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 391 KB

english, 2004

2

Thermal investigation of micro-filament heaters

P. Fürjes, Zs. Vizváry, M. Ádám, A. Morrissey, Cs. Dücső, I. Bársony

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 238 KB

english, 2002

3

Three-dimensional force sensor by novel alkaline etching technique

É. Vázsonyi, M. Ádám, Cs. Dücső, Z. Vízváry, A.L. Tóth, I. Bársony

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 470 KB

english, 2005

4

Olfactory detection of methane, propane, butane and hexane using conventional transmitter norms

S. Kulinyi, D. Brandszájsz, H. Amine, M. Ádám, P. Fürjes, I. Bársony, Cs. Dücső

Journal:

Sensors and Actuators B: Chemical

Year:

2005

Language:

english

File:

PDF, 525 KB

english, 2005

5

Porous silicon bulk micromachining for thermally isolated membrane formation

Cs Dücsö, É Vázsonyi, M Ádám, I Szabó, I Bársony, J.G.E Gardeniers, A van den Berg

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 836 KB

english, 1997

6

Concept for processing of silicon check valves by proton beam micromachining

Cs. Dücso˝, I. Rajta, P. Fürjes, E. Baradács

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

2007

Language:

english

File:

PDF, 800 KB

english, 2007

7

Si micro-turbine by proton beam writing and porous silicon micromachining

I. Rajta, S.Z. Szilasi, P. Fürjes, Z. Fekete, Cs. Dücső

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

2009

Language:

english

File:

PDF, 342 KB

english, 2009

8

Micro-hotplates for thermal characterisation of structural materials of MEMS

P. Csíkvári, P. Fürjes, Cs. Dücső, I. Bársony

Journal:

Microelectronics Journal

Year:

2009

Language:

english

File:

PDF, 359 KB

english, 2009

9

Structural and electronic properties of Si/SiO2 MOS structures with aligned 3C–SiC nanocrystals in the oxide

A. Pongrácz, G. Battistig, Cs. Dücső, K.V. Josepovits, P. Deák

Journal:

Materials Science and Engineering: C

Year:

2007

Language:

english

File:

PDF, 529 KB

english, 2007

10

X-ray photoelectron spectroscopy investigations of Si in non-stoichiometric SiNx LPCVD multilayered coatings

D.L. Wainstein, A.I. Kovalev, Cs. Ducso, T. Jaszi, P. Basa, Zs.J. Horvath, T. Lohner, P. Petrik

Journal:

Physica E: Low-dimensional Systems and Nanostructures

Year:

2007

Language:

english

File:

PDF, 550 KB

english, 2007

11

Thermal response of microfilament heaters in gas sensing

I. Bársony, P. Fürjes, M. Ádám, Cs. Dücső, Zs. Vı́zváry, J. Zettner, F. Stam

Journal:

Sensors and Actuators B: Chemical

Year:

2004

Language:

english

File:

PDF, 175 KB

english, 2004

12

Thermal effects by the sensitive coating of calorimetric gas sensors

P. Fürjes, M. Ádám, Cs. Dücső, J. Zettner, I. Bársony

Journal:

Sensors and Actuators B: Chemical

Year:

2005

Language:

english

File:

PDF, 330 KB

english, 2005

13

Thermal characterisation of micro-hotplates used in sensor structures

P. Fürjes, Cs. Dücső, M. Ádám, J. Zettner, I. Bársony

Journal:

Superlattices and Microstructures

Year:

2004

Language:

english

File:

PDF, 2.51 MB

english, 2004

14

Electrical characterisation of Al/n–Si/p–Si Schottky junctions prepared by plasma immersion implantation

Zs.J. Horváth, M. Ádám, Cs. Dücsö, I. Pintér, Vo Van Tuyen, I. Bársony, E. Gombia, R. Mosca, Zs. Makaró

Journal:

Solid-State Electronics

Year:

1998

Language:

english

File:

PDF, 283 KB

english, 1998

15

Anomalous temperature dependence of series resistance in AgSi and AlSi Schottky junctions

Zs J Horváth, M Ádám, I Pintér, B Cvikl, D Korošak, T Mrdjen, Vo Van Tuyen, Zs Makaró, Cs Dücsö, I Bársony

Journal:

Year:

1998

Language:

english

File:

PDF, 197 KB

english, 1998

16

Small-angle neutron scattering in porous silicon

G. Kádár, G. Káli, Cs. Dücső, É.B. Vázsonyi

Journal:

Physica B: Condensed Matter

Year:

1997

Language:

english

File:

PDF, 139 KB

english, 1997

17

Porous silicon-based humidity sensor with interdigital electrodes and internal heaters

P. Fürjes, A. Kovács, Cs. Dücso&amp, #x030B, , M. Ádám, B. Müller, U. Mescheder

Journal:

Sensors and Actuators B: Chemical

Year:

2003

Language:

english

File:

PDF, 232 KB

english, 2003

18

Electrical and optical properties of Si-rich SiNx layers: Effect of annealing

P. Szöllősi, P. Basa, Cs. Dücső, B. Máté, M. Ádám, T. Lohner, P. Petrik, B. Pécz, L. Tóth, L. Dobos, L. Dózsa, Zs.J. Horváth

Journal:

Current Applied Physics

Year:

2006

Language:

english

File:

PDF, 99 KB

english, 2006

19

Porous silicon host matrix for deposition by atomic layer epitaxy

M Utriainen, S Lehto, L Niinistö, Cs Dücső, N.Q Khanh, Z.E Horváth, I Bársony, B Pécz

Journal:

Thin Solid Films

Year:

1997

Language:

english

File:

PDF, 406 KB

english, 1997

20

Ion beam analysis of plasma immersion implanted silicon for solar cell fabrication

N.Q. Khánh, I. Pintér, Cs. Dücső, M. Ádám, E. Szilágyi, I. Bársony, M.A. El-Sherbiny, J. Gyulai

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

1996

Language:

english

File:

PDF, 395 KB

english, 1996

21

Efficient catalytic combustion in integrated micropellistors

Bársony, I, Ádám, M, Fürjes, P, Lucklum, R, Hirschfelder, M, Kulinyi, S, Dücső, Cs

Journal:

Measurement Science and Technology

Year:

2009

Language:

english

File:

PDF, 2.70 MB

english, 2009

22

[IEEE 2007 13th International Workshop on Thermal Investigation of ICs and Systems (THERMINIC) - Budapest, Hungary (2007.09.17-2007.09.19)] 2007 13th International Workshop on Thermal Investigation of ICs and Systems (THERMINIC) - Micro-hotplates for thermal characterisation of structural materials of MEMS

Furjes, P., Csikvari, P., Barsony, I., Ducso, Cs.

Year:

2007

Language:

english

File:

PDF, 1.05 MB

english, 2007

23

[IEEE IEEE Sensors, 2004. - Vienna, Austria (Oct. 24 - 27, 2004)] Proceedings of IEEE Sensors, 2004. - Three dimensional single crystalline force sensor by porous Si micromachining

Adam, M., Vazsonyi, E., Barsony, I., Vasarhelyi, G., Ducso, Cs.

Year:

2004

Language:

english

File:

PDF, 815 KB

english, 2004

24

[IEEE 2008 IEEE Sensors - Lecce, Italy (2008.10.26-2008.10.29)] 2008 IEEE Sensors - Integrated tactile system for dynamic 3D contact force mapping

Vasarhelyi, G., Adam, M., Ducso, Cs., Barsony, I., Kis, A.

Year:

2008

Language:

english

File:

PDF, 766 KB

english, 2008

25

Micro-pellistor with Integrated Porous Alumina Catalyst Support

Bíró, F., Pap, A.E., Bársony, I., Dücső, Cs.

Journal:

Procedia Engineering

Year:

2014

Language:

english

File:

PDF, 827 KB

english, 2014

26

Effect of Hexagonal WO3 Morphology on NH3 Sensing

Takács, M., Dücső, Cs., Lábadi, Z., Pap, A.E.

Journal:

Procedia Engineering

Year:

2014

Language:

english

File:

PDF, 956 KB

english, 2014

27

Membrane Platforms for Sensors

Bársony, I., Dücső, Cs., Fürjes, P., Riesz, F., Hajnal, Z., Battistig, G.

Journal:

Procedia Engineering

Year:

2014

Language:

english

File:

PDF, 1.28 MB

english, 2014

28

Growth and characterization of broad spectrum infrared emitting GaInAsP/InP heterostructures

Rakovics, V., Nádas, J., Réti, I., Dücső, Cs., Battistig, G.

Journal:

Journal of Crystal Growth

Year:

2016

Language:

english

File:

PDF, 844 KB

english, 2016

29

Nucleation of SiC nanocrystals at the Si/SiO 2 interface: Effect of the interface properties

Pongrácz, A., Battistig, G., Tóth, A. L., Makkai, Zs., Dücső, Cs., Josepovits, K. V., Bársony, I.

Journal:

Journal de Physique IV (Proceedings) /Le Journal de Physique IV

Year:

2006

Language:

english

File:

PDF, 198 KB

english, 2006